摘要: 采用射频磁控溅射法制备了一系列的 (CoTaZr) _x (Al ₂ O ₃ ) _1−x (x = 0.23 ， 0.32 ， 0.43) 纳米颗粒膜，研究了溅射功率和气压对其软磁性能和微观组织结构的影响，结果表明，样品的电阻率随功率增大而递增，电阻率和饱和磁化强度都随气压先增大后减小，最佳溅射气压为 2.5 Pa 。磁性颗粒体积分数较高的样品具有较高的 Ms ， 但电阻率相应较小，在 x = 0.32 时，试样的电阻率 ρ 为 2.73 × 10⁴µΩcm ， 比饱和磁化强度 Ms 为 56.8 emu/g 。 SEM 分析结果表明， Al ₂ O ₃ 颗粒均匀地分布在磁性颗粒之间。

Abstract: A series of(CoTaZr)_x(Al₂O₃)_1−x ( x = 0.23, 0.32, 0.43 ) magnetic granular films are prepared by RF magnetron sputtering. The effect of sputtering power and pressure on electromagnetic properties and microstructure are studied. Results show that higher sputtering power induces to higher resistivity. The properties first increase and then decrease with the pressure increasing. The better property has been obtained when the pressure is 2.5 Pa. The sample with higher volume fraction of magnetic particles has higher saturation magnetization but lower resistivity. When x = 0.32, the sample has better properties with the specific saturation magnetization of 56.8 emu/g and resistivity of 2.73 × 10 ⁴ µΩcm. By SEM, it can be seen thatAl₂O₃ particles distribute uniform among the magnetic particles.